IJM05 Structural Diagnosis of Nanostructured Cadmium Manganite Thin Films Prepared by DC Reactive Sputtering

Abstract

In this work, an attempt to prepare cadmium manganite (CdMn₂O₄) nanostructures is presented. These nanostructures were prepared by reactive magnetron co-sputtering technique. The cadmium and manganese targets were mounted in a geometrical configuration allowing to achieve the stoichiometry of the prepared compound. The effect of Ar:O₂ mixing ratio on the structural characteristics of the prepared nanostructures was introduced. The growth of crystal planes in the prepared samples could be reasonably controlled by tuning the operation parameters and preparation conditions. The structural characterization showed that the prepared nanostructures were highly pure.