Isentropic and Isenthalpic Cooling Techniques for Low-Temperature Discharges

Abstract

In this article, the most common techniques used for the production of gas discharges at low temperatures are introduced. These techniques are mainly based on the isentropic and isenthalpic cooling processes of gases inside reactors known as liquefiers. The theoretical liquefaction efficiency of the helium was determined according to the physical data of this gas. Such determination can be extended to other inert gases used for generation of discharge plasmas, such as argon and neon as well as those gases usually used as reactive in plasma processing techniques, such as hydrogen, nitrogen and oxygen.