Influence of Processing Pattern on Topographical Characteristics of Metal Microstructures Fabricated by Pulsed Laser Machining

Abstract

In this paper, pulsed Nd:YAG laser of 60kW peak power was used to carry out material removal process to manufacture 3D microstructures from Inconel-600 samples at micrometer dimensions for micro-stamping and micro-embossing on metals. Different parameters, such as power density, overlap of laser pulses and processing velocity, were determined to introduce their effects on the roughness of the machined surfaces. The surface roughness was decreased by 80% to reach about 1 micron as the velocity of laser beam was increased by 600% to be 300 mm/s.