Composition Tuning of Silicon Nitride Nanomaterial Synthesized by Plasma-Assisted Deposition Technique. IRAQI JOURNAL OF MATERIALS, [S. l.], v. 5, n. 1, p. 31–38, 2026. DOI: 10.2022/zv84rd52. Disponível em: http://ijmaterials.com/index.php/ijm/article/view/125. Acesso em: 21 oct. 2026.