IJM013 Effects of Partial Oxygen Content on Crystalline Structure and Surface Topography of Nanostructured Al2O3 Thin Films Prepared by DC Reactive Sputtering Technique. IJM [Internet]. 2025 Oct. 1 [cited 2026 Sep. 5];4(4):145-52. Available from: http://ijmaterials.com/index.php/ijm/article/view/111