Preparation and Characterization of Nanostructured Silicon Nitride Thin Films by Reactive Sputtering. IRAQI JOURNAL OF MATERIALS, [S. l.], v. 1, n. 1, p. 1–6, 2024. DOI: 10.2022/pxqhr936. Disponível em: https://ijmaterials.com/index.php/ijm/article/view/1. Acesso em: 5 sep. 2026.