Employment of Closed-Field Dual Magnetrons Sputtering for Synthesis of Silicon Nitride Nanostructures. IRAQI JOURNAL OF MATERIALS, [S. l.], v. 1, n. 1, p. 25–38, 2024. DOI: 10.2022/eg7k8888. Disponível em: https://ijmaterials.com/index.php/ijm/article/view/4. Acesso em: 5 sep. 2026.