IJM014 Optoelectronics Characteristics of Multilayer SiC/SiO2 and SiO2/SiC Structures Prepared by DC Reactive Sputtering. IJM [Internet]. 2025 Oct. 1 [cited 2026 Sep. 21];4(4):189-98. Available from: https://ijmaterials.com/index.php/ijm/article/view/112