Mechanisms of Low-Pressure Magnetized Glow Discharge Plasmas

Abstract

In this article, the key mechanisms of glow discharge in low-pressure gas mixtures were presented and discussed. The particle motions – mainly collisions – in discharge plasma those considered in most applications of plasma were presented. The regions of glow discharge were identified and their main characteristics were highlighted. These mechanisms were supported by experimental results obtained from a homemade dc plasma sputtering system. The experimental parameters, such as inter-electrode distance, using magnetrons and adding nitrogen to the gas mixture, and their effects on the Paschen’s curve of glow discharge were introduced.